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Flexible a-Si:H-based Image Sensors Fabricated by Digital Lithography

Published online by Cambridge University Press:  01 February 2011

William S. Wong ,
TseNga Ng ,
Michael L. Chabinyc ,
Rene A. Lujan ,
Raj B. Apte ,
Sanjiv Sambandan ,
Scott Limb  and
Robert A. Street
William S. Wong
Affiliation:
wsw@parc.com, Palo Alto Research Center, Electronic Materials and Devices Lab, 3333 Coyote Hill Road, Palo Alto, CA, 94304, United States, 650-812-4660, 650-812-4105
TseNga Ng
Affiliation:
tnng@parc.com, Palo Alto Research Center, Electronic Materials and Devices Lab, 3333 Coyote Hill Road, Palo Alto, CA, 94304, United States
Michael L. Chabinyc
Affiliation:
mchabiny@parc.com, Palo Alto Research Center, Electronic Materials and Devices Lab, 3333 Coyote Hill Road, Palo Alto, CA, 94304, United States
Rene A. Lujan
Affiliation:
lujan@parc.com, Palo Alto Research Center, Electronic Materials and Devices Lab, 3333 Coyote Hill Road, Palo Alto, CA, 94304, United States
Raj B. Apte
Affiliation:
apte@parc.com, Palo Alto Research Center, Electronic Materials and Devices Lab, 3333 Coyote Hill Road, Palo Alto, CA, 94304, United States
Sanjiv Sambandan
Affiliation:
sambandan@parc.com, Palo Alto Research Center, Electronic Materials and Devices Lab, 3333 Coyote Hill Road, Palo Alto, CA, 94304, United States
Scott Limb
Affiliation:
slimb@parc.com, Palo Alto Research Center, Hardware Systems Lab, 3333 Coyote Hill Road, Palo Alto, CA, 94304, United States
Robert A. Street
Affiliation:
street@parc.com, Palo Alto Research Center, Electronic Materials and Devices Lab, 3333 Coyote Hill Road, Palo Alto, CA, 94304, United States
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Abstract

Amorphous silicon-based x-ray image sensor arrays were fabricated on poly-ethylene naphthalate substrates at process temperatures below 180°C. Patterning of the thin-film transistor backplane was accomplished using ink-jet printed etch masks. The sensor devices were found to be comparable to high-temperature processed devices. The integration of the sensor stack, TFT array and PEN substrate resulted in a flexible x-ray image sensor with 180×180 pixels with 75 dpi resolution.

Keywords

thin filmsensorSi

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References

1 Street, R. A., Large Area Image Sensor Arrays, Technology and Applications of Amorphous Silicon, Street, R.A. (Ed.), pp. 147–221 (Springer-Verlag, 2000).Google Scholar
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