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Flexible surface acoustic wave devices and its applications in microfluidics

Published online by Cambridge University Press:  09 January 2014

Jian Zhou ,
Xingli He ,
Wenbo Wang ,
Nana Hu ,
Hao Jin ,
Y. Xu ,
Shurong Dong ,
Demiao Wang ,
Y.Q. Fu  and
J. K. Luo
Jian Zhou
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China Thin Film Centre, University of West Scotland, Paisley, PA1 2BE, UK
Xingli He
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Wenbo Wang
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Nana Hu
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Hao Jin
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Y. Xu
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Shurong Dong
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Demiao Wang
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Y.Q. Fu
Affiliation:
Thin Film Centre, University of West Scotland, Paisley, PA1 2BE, UK
J. K. Luo*
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China Inst. of Renew. Energ.&Environ. Tech. Bolton University, Deane Road, Bolton BL3 5AB, U.K
*
*Corresponding authors e-mails: J.Luo@bolton.ac.uk
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Abstract:

Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

Keywords

acousticfilmpiezoelectric
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1659: Symposium SS/XX – Micro- and Nanoscale Systems – Novel Materials, Structures and Devices , 2014 , pp. 27 - 33
Copyright
Copyright © Materials Research Society 2014 

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