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Formation and Properties of TiSi2 as Contact Material for High-Temperature Thermoelectric Generators

Published online by Cambridge University Press:  29 November 2012

Fabian Assion
Affiliation:
Department of Sensor Technology, University of Paderborn, 33098 Paderborn, Germany
Marcel Schönhoff
Affiliation:
Department of Sensor Technology, University of Paderborn, 33098 Paderborn, Germany
Ulrich Hilleringmann
Affiliation:
Department of Sensor Technology, University of Paderborn, 33098 Paderborn, Germany
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Abstract

Thermoelectric generators (TEG) are capable of transforming waste heat directly into electric power. With higher temperatures the yield of the devices rises which makes high-temperature contact materials important. The formation of titanium disilicide (TiSi2) and its properties were analyzed and optimized for the use in TEG. Depending on a direct or an indirect transformation into the C54 crystal structure the process forms a layer with a resistivity of 20-22 μΩcm. Process gases influence the resistivity and result in difference of 20 %. The growing rate of TiSi2on silicon dioxide was determined; it shows a strong dependence on the used atmosphere and temperature. A maximum overgrowing length of 30 μm was found.

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Articles
Copyright
Copyright © Materials Research Society 2012 

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References

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