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From Intelligent Materials to Smart Sensors: a-Si:H Position Sensitive Detectors

Published online by Cambridge University Press:  10 February 2011

E. Fortunato ,
M. Fernandes ,
F. Soares ,
G. Lavareda  and
R. Martins
E. Fortunato
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
M. Fernandes
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
F. Soares
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
G. Lavareda
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
R. Martins
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
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Abstract

This work presents the main static and dynamic performances showed by one dimensional thin film position sensitive detectors (ID TFPSD), based on a-Si:H technology, with a size of 80 mm × 5 mm. The results obtained show that the TFPSD is able to respond to light powers as low as 2μ W/cm2, presenting a detection accuracy, linearity and response frequency better than 10 gm, 2% and 2 KHz, respectively. These results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems where continuous quality control is required.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 420: Symposium A – Amorphous Silicon Technology-1996 , 1996 , 165
Copyright
Copyright © Materials Research Society 1996

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References

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