Hostname: page-component-8448b6f56d-42gr6 Total loading time: 0 Render date: 2024-04-18T10:13:00.168Z Has data issue: false hasContentIssue false
  • English
  • Français

Gas-Phase and Surface Reactions of Decomposed Species In Catalytic Cvd

Published online by Cambridge University Press:  17 March 2011

Namiko Honda ,
Atsushi Masuda  and
Hideki Matsumura
Namiko Honda
Affiliation:
School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), Asahidai, Tatsunokuchi, Ishikawa 923-1292, Japan
Atsushi Masuda
Affiliation:
School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), Asahidai, Tatsunokuchi, Ishikawa 923-1292, Japan
Hideki Matsumura
Affiliation:
School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST), Asahidai, Tatsunokuchi, Ishikawa 923-1292, Japan
Get access

Abstract

Gas-phase and surface reactions of transported species decomposed on the catalyzer were investigated in catalytic CVD (Cat-CVD), often called hot-wire CVD, using a specially designed reactor tube. The phenomena were comparatively studied using H2- or He-diluted SiH4. It turned out that the control of gas flow through the catalyzer between the gas showerhead and the substrate is a key factor to obtain high uniformity in not only the film thickness but also the crystallinity for Si films prepared by Cat-CVD using the gas pressure above about 10 Pa and the gas-flow velocity faster than several m/s.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 609: Symposium A – Amorphous & Heterogeneous Silicon Thin Films – 2000 , 2000 , A19.1
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Matsumura, H. and Tachibana, H., Appl. Phys. Lett., 47, 833 (1985).Google Scholar
[2] Mahan, A. H., Carapella, J., Nelson, B. P., Crandall, R. S. and Balberg, I., J. Appl. Phys., 69, 6728 (1991).Google Scholar
[3] Matsumura, H., Jpn. J. Appl. Phys., 37, 3175 (1998).Google Scholar
[4] Honda, N., Masuda, A. and Matsumura, H., J. Non-Cryst. Solids, (2000) (in press).Google Scholar
[5] Suzuki, S., Kondo, M. and Matsuda, A., Abst. 2000 Mater. Res. Soc. Spring Meeting, San Francisco, 2000, A19.5.Google Scholar