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Grating Coupled Waveguide Biosensor Based on PorousSilicon

Published online by Cambridge University Press:  21 March 2011

Xing Wei  and
Sharon M. Weiss
Xing Wei
Affiliation:
Department of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, TN 37235, USA
Sharon M. Weiss
Affiliation:
Department of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, TN 37235, USA
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Abstract

Porous silicon waveguides with integrated porous silicon grating couplersare demonstrated as small molecule biosensors. Two fabrication methods arepresented for the grating couplers: standard electron beam lithography withreactive ion etching and a new technique based on direct imprinting ofporous substrates. Although the gratings fabricated using standardlithographic techniques have steeper sidewalls and enable a larger availablesensing surface area inside the waveguide, the imprinted gratings have theadvantage of rapid and low-cost fabrication. Both the lithographically andimprinted sensors are shown to have waveguide losses on the order of 10dB/cm, and both are demonstrated for detection of 16mer nucleic acids.

Keywords

Siopticalsensor

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