Skip to main content

Imaging, Manipulating, and Analyzing with Nanometer Precision: Application of the Nanoworkbench

  • Olivier Guise (a1), Joachim Ahner (a1) (a2), Jeremy Levy (a3) and John T. Yates (a1) (a3)

We report the development of novel nanometer-scale manipulative and analytical devices for imaging, chemically analyzing and manipulating nanometer-scaled materials. Two different versions of the nanoworkbench are operating currently at the Surface Science Center of the University of Pittsburgh and at the Seagate Research Center in Pittsburgh. The instrument at Seagate consists of a modified commercially available high resolution scanning electron microscope (lateral resolution ∼1 nm at 10 kV) in combination with a set of four unique nano-manipulators, operating in the pressure range from 102 to 10−7 mbar. At the University of Pittsburgh a home-built UHV version of the nanoworkbench is in operation. In this UHV-instrument, several inter-connected UHV chambers allow in-situ deposition of thin-films and conventional surface analysis. The resolution of the SEM of the UHV system is limited to about 50 nm. We report the first results obtained by using both versions of the nanoworkbench, where we succeeded in writing patterns of ultra-small carbon-containing dots (8nm in diameter) with high position accuracy (<5nm) by electron-beam-induced deposition of carbon-containing background gases. Additionally, four-point probe measurements were performed on a SiGe system.

Hide All
1 Goldstein, Joseph, Newbury, Dale, Joy, David C., Lyman, Charles E., Echlin, Patrick, Lifshin, Eric, Sawyer, Linda, Michael, Joseph R., Scanning Electron Microscopy and X-Ray Microanalysis, 3rd edition. (Kluwer Academic/Plenum Publishers, New York, 2003);
Meyer, E., Hug, H. J., and Bennewitz, R., Scanning Probe Microscopy: The Lab on a Tip. (Springer Verlag, New York, 2003).
2 Hasegawa, S. and Grey, F., Surf. Sci. 500, 84 (2002).
3 Ahner, J., MSTnews 4 (4), 16 (1999).
4 Van der Pauw, L. J., Philips Res. Reports 13, 1 (1958).
5 Voigtlander, B., Surface Science Reports 43, 127 (2001).
6 Mo, Y.-W., Savage, D. E., Swartzentruber, B. S., and Lagally, M. G., Physical Review Letters 65 (8), 1020 (1990).
7 Schmidt, O. G., Lange, C., Eberl, K., Kienzle, O., and Ernst, F., Applied Physics Letters 71 (16), 2340 (1997).
8 Koops, H. W. P., Weiel, R., Kern, D. P., and Baum, T. H., Journal of Vacuum Science & Technology B 6 (1), 477 (1988);
Lee, K. L. and Hatzakis, M., Journal of Vacuum Science & Technology B 7 (6), 1941 (1989).
9 Guise, O., Marbach, H., Levy, J., Ahner, J., and Yates, J. T. Jr, in preparation.
10 Petersen, C. L., Grey, F., Shiraki, I., and Hasegawa, S., Appl. Phys. Lett. 77 (23), 3782 (2000);
Hasegawa, S., Shiraki, I., Tanikawa, T., Petersen, C. L., Hansen, T. M., Boggild, P., and Grey, F., J. Phys.: Condens. Matter 14, 8379 (2002);
Kanagawa, T., Hobara, R., Matsuda, I., Tanikawa, T., Natori, A., and Hasegawa, S., Physical Review Letters 91 (3), 036805 (2003).
11 Montgomery, H. C., J. Appl. Phys. 42, 2971 (1971);
Price, W. L. V., J. Phys. D. 5, 1127 (1972).
12 Koon, D. W. and Knickerboxer, C. J., Rev. Sci. Instrum. 63 (1), 207 (1992).
13 Guise, O., Ahner, J., Jung, M.-C., Goughnour, P. C., and Yates, J. T. Jr, Nanoletters 2 (3), 191 (2002).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed