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In Situ High-Temperature Cross-Sectional TEM Specimen Preparation

Published online by Cambridge University Press:  21 February 2011

Eric M. Fiore  and
Rodney A. Herring
Eric M. Fiore
Affiliation:
Martin Marietta Laboratories, 1450 S. Rolling Rd., Baltimore, MD 21227-3898
Rodney A. Herring
Affiliation:
Martin Marietta Laboratories, 1450 S. Rolling Rd., Baltimore, MD 21227-3898
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Abstract

We describe a technique for preparing transmission electron microscope (TEM) cross-sectional specimens for observation during in situ annealing to high temperatures. The process utilizes a ceramic adhesive that is stable to a temperature of 1650°C. The technique, which was successfully used to observe the recrystallization of amorphized silicon, is being applied to high-energy ion-implanted silicon in an attempt to better understand the amorphous-to-crystalline phase transformation and defect formation mechanisms resulting from thermal processing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 115: Symposium W – Specimen Preparation for Transmission Electron Microscopy of Materials I , 1987 , 125
Copyright
Copyright © Materials Research Society 1988

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References

REFERENCES

1) Parker, M.A., Sigmon, T.W. and Sinclair, R. in Materials Problem Solving with the Transmission Electron Microscope, edited by Hobbs, L.H., Westmacott, K.H., and Williams, D.B. (Mater. Res. Soc. Proc. 62, Pittsburgh, PA 1986) pp. 311–321.Google Scholar
2. Bravman, J.C. and Sinclair, R., J. Electron Microsc. Tech. 1, 53–61 (1984).CrossRefGoogle Scholar