Skip to main content
×
Home
    • Aa
    • Aa

Influence of Embedded a-Si:H Layer Location on Floating-gate a-Si:H TFT Memory Functions

  • Yue Kuo (a1) and Mary Coan (a2)
Abstract
Abstract

The influence of the location of the embedded a-Si:H layer in the gate dielectric film of the floating-gate a-Si:H TFT on the charge trapping and detrapping mechanisms has been investigated. The thin channel-contact SiNx gate dielectric layer favors both hole and electron trappings under the proper gate voltage condition. The sweep gate voltage affect the locations and shapes of forward and backward transfer characteristics curves, which determines the memory function. In order to achieve a large memory window, both the location of the embedded a-Si:H layer and the gate voltage sweep range need to be optimized.

Copyright
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

1 Y. Kuo and H. Nominanda , Appl. Phys. Lett. 89, 1 (2006).

2 Y. Kuo and H. Nominanda , Mat. Res. Soc. Symp. Proc. Vol. 989, Warrendale, PA, A1003 (2007).

3 Y. Kuo and H. Nominanda , J. Korean Phys. Soc. 54(1), 409 (2009).

4 Y. Kuo and H. Nominanda , Mat. Res. Soc. Symp. Proc. Vol. 1066, Warrendale, PA, 1066–A08 (2008).

5 D. Kahng and S. M. Sze , Bell Syst. Tech. J. 46 1283 (1967).

7 Y. Kuo , SPIE Proc. 1456, 288 (1991).

8 Y. Kuo and M. Crowder , J. Electrochem. Soc. 139(2), 548 (1992).

9 Y. Kuo , J. Electrochem. Soc. 142(1), 186 (1995).

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Keywords:

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 3 *
Loading metrics...

Abstract views

Total abstract views: 29 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 30th March 2017. This data will be updated every 24 hours.