Skip to main content

Influence of Film/Substrate Interface Structure on Plasticity in Metal Thin Films

  • G. Dehm (a1), B.J. Inkson (a2), T.J. Balk (a1), T. Wagner (a1) and E. Arzt (a1)...

In-situ transmission electron microscopy studies of metal thin films on substrates indicate that dislocation motion is influenced by the structure of the film/substrate interface. For Cu films grown on silicon substrates coated with an amorphous SiNx diffusion barrier, the transmission electron microscopy studies reveal that dislocations are pulled towards the interface, where their contrast finally disappears. However, in epitaxial Al films deposited on single-crystalline α- Al2O3 substrates, threading dislocations advance through the layer and deposit dislocation segments adjacent to the interface. In this latter case, the interface is between two crystalline lattices. Stresses in epitaxial Al films and polycrystalline Cu films were determined by substrate- curvature measurements. It was found that, unlike the polycrystalline Cu films, the flow stresses in the epitaxial Al films are in agreement with a dislocation-based model.

Hide All
1.Nix, W.D., Metall. Trans. A 20, 2217 (1989).
2.Nix, W.D., Scripta Mater. 39, 545 (1998).
3.Kuan, T.S. and Murakami, M., Metall. Trans. A 13, 383 (1982).
4.Venkatraman, R., Bravman, J.C., Nix, W.D., Davies, P.W., Flinn, P.A., and Fraser, D.B., J. Electr. Mater. 19, 1231 (1990).
5.Jawarani, D., Kawasaki, H., Yeo, I-S., Rabenberg, L., Stark, J.P., and Ho, P.S., J. Appl. Phys. 82, 171 (1997).
6.Mader, S. and Chaudhari, P., J. Vac. Sci. Technol. 6, 615 (1969).
7.Müllner, P. and Arzt, E. in Thin Films: Stresses and Mechanical Properties VII, edited by Cammarata, R.C., Nastasi, M., Busso, E.P., Oliver, W.C. (Mater. Res. Soc. Proc. 505, Pittsburgh, PA, 1998) p. 149.
8.Kobrinsky, M.J. and Thompson, C.V., Acta Mat. 48, 625 (2000).
9.Keller, R-M., Sigle, W., Baker, S.P., Kraft, O., and E. Arzt in Thin Films: Stresses and Mechanical Properties VI, edited by Gerberich, W.W., Gao, H., Sundgren, J-E., Baker, S.P. (Mater. Res. Soc. Proc. 435, Pittsburgh, PA, 1997) p. 221.
10.Legros, M., Dehm, G., R-M. Keller-Flaig, Arzt, E., Hemker, K.J., and Suresh, S., Materials Science and Eng. A (2001) in press.
11.Dehm, G. and Arzt, E., Applied Physics Letters 77, 1126 (2000).
12.Dehm, G., Weiss, D. and Arzt, E., Materials Science and Eng. A (2001) in press.
13.Inkson, B., Dehm, G. and Wagner, T. in Physical Sciences II, edited by Gemperlova, J., Vavra, I. (Proceedings of the 12th European Congress on Electron Microscopy, Brno, Czech Republic, 2000) p. 539.
14.Inkson, B., Spolenak, R. and Wagner, T., EMAG Inst. Phys. Conf. Ser. 161, 335 (1999).
15.Keller, R-M., Baker, S.P. and Arzt, E., J. Mater. Res. 13, 1307 (1998).
16.Stoney, G.G., Proc. R. Soc. A 82, 172 (1909).
17.Dehm, G., Ernst, F., Mayer, J., Möbus, G., Müllejans, H., Phillipp, F., Scheu, C., Rühle, M., Z. Metallkunde 87, 898 (1996).
18.Strecker, A., Salzberger, U., Mayer, J., Prakt. Metallogr. 30, 482 (1993).
19.Marien, J., Plitzko, J.M., Spolenak, R., Keller, R-M., and Mayer, J., J. of Micros. 194, 71 (1999).
20.Roos, B. and Ernst, F., J. Cryst. Growth 137, 457 (1994).
21.Ernst, F., Raj, R., and Rühle, M., Z. Metallkunde 12, 961 (1999).
22.Mader, W., Z. Metallkunde 80, 139 (1989).
23.Gutkin, M. Yu., Militzer, M., Romanov, A. E., and Vladimirov, V. I., Phys. Stat. Sol. (a) 113, 337 (1989).
24.Vellinga, W.P., Hosson, J.T.M. De, and Vitek, V., Acta Mater. 45, 1525 (1997).
25.Romanov, A. E., Wagner, T., and Rühle, M., Scripta Materialia 38, 869 (1998).
26.Arzt, E., Dehm, G., Gumbsch, P., Kraft, O., and Weiss, D., Progress in Materials Science 46, 283 (2001).
27.Blanckenhagen, B. von, Gumbsch, P., and Arzt, E., in this volume (2001).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed