Skip to main content
×
Home

Interconnection Technology for Modern Logic Devices; an Exercise in System Engineering to Assure Manufacturability

  • William T. Siegle (a1)
Abstract

The history of the semiconductor IC has often been dominated by the issues associated with transistor engineering. In recent years however, it has become clear that successful mastery of advanced logic devices depends not only on transistor engineering, but also on the ability to engineer and manufacture multiple level metallization systems to form the interconnect structure of modern and dense logic ICs.

Copyright
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 1 *
Loading metrics...

Abstract views

Total abstract views: 28 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 23rd November 2017. This data will be updated every 24 hours.