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Interface Stability between Ni-P film plated by Supercritical Electroless Plating and the Polymer Substrate

Published online by Cambridge University Press:  01 February 2011

Byung-Hoon Woo ,
Masato Sone ,
Akinobu Shibata ,
Chiemi Ishiyama ,
Masahiro Yamagata ,
Kaoru Masuda  and
Yakichi Higo
Byung-Hoon Woo
Affiliation:
woo.b.aa@m.titech.ac.jp, Tokyo institute of technology, Precision and Intelligence Laboratory, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Tokyo, 226-8503, Japan
Masato Sone
Affiliation:
woo.b.aa@m.titech.ac.jp, Tokyo institute of technology, Precision and Intelligence Laboratory, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Tokyo, 226-8503, Japan
Akinobu Shibata
Affiliation:
woo.b.aa@m.titech.ac.jp, Tokyo institute of technology, Precision and Intelligence Laboratory, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Tokyo, 226-8503, Japan
Chiemi Ishiyama
Affiliation:
woo.b.aa@m.titech.ac.jp, Tokyo institute of technology, Precision and Intelligence Laboratory, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Tokyo, 226-8503, Japan
Masahiro Yamagata
Affiliation:
woo.b.aa@m.titech.ac.jp, Tokyo institute of technology, Precision and Intelligence Laboratory, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Tokyo, 226-8503, Japan
Kaoru Masuda
Affiliation:
woo.b.aa@m.titech.ac.jp, Tokyo institute of technology, Precision and Intelligence Laboratory, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Tokyo, 226-8503, Japan
Yakichi Higo
Affiliation:
woo.b.aa@m.titech.ac.jp, Tokyo institute of technology, Precision and Intelligence Laboratory, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Tokyo, 226-8503, Japan
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Abstract

We propose a novel technique for electroless plating on polymer substrates using a dense CO2 beyond the critical point. Ni-P thin films were fabricated by a novel, hybrid technique consisting of two processes: catalyzation in supercritical CO2 with Pd bis-acetylacetonate and electroless plating in emulsion with dense carbon dioxide. Catalyzation in supercritical CO2 enabled the nucleation of a large number of Pd nuclei on a polyimide substrate without chemical pretreatment, and the deposition of a uniform Ni-P metal film. The electroless plating in emulsion with dense carbon dioxide produced a uniformly plated film without peeling or nodules. The improved uniformity was attained by the solubility and diffusivity of the dense CO2 beyond the critical point in the emulsion.

Keywords

electrodepositionNipolymer
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1054: Symposium FF – Synthesis and Surface Engineering of Three-Dimensional Nanostructures , 2007 , 1054-FF08-03
Copyright
Copyright © Materials Research Society 2008

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References

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