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Interfacial Diffusion in a MOCVD Grown Barium Titanate Film

Published online by Cambridge University Press:  10 February 2011

A. Datta ,
Soma Chattopadhyay ,
A.G. Richter ,
J. Kmetko  and
C. B. Lee
A. Datta
Affiliation:
Department of Physics and Astronomy, Northwestern University, IL 60208-3112 Presently at: NSF Center for Advanced Materials and Smart Structures, Department of Electrical Engineering, North Carolina Agricultural and Technical State University, Greensboro, NC 27411 and Materials Science Department, North Carolina State University, Raleigh, NC 27695-7916.
Soma Chattopadhyay
Affiliation:
Department of Materials Science and Engineering and Materials Research Center, Northwestern University, Evanston, Illinois 60201. Presently at: NSF Center for Advanced Materials and Smart Structures, Department of Electrical Engineering, North Carolina Agricultural and Technical State University, Greensboro, NC 27411 and Materials Science Department, North Carolina State University, Raleigh, NC 27695-7916.
A.G. Richter
Affiliation:
Department of Physics and Astronomy, Northwestern University, IL 60208-3112 Presently at: NSF Center for Advanced Materials and Smart Structures, Department of Electrical Engineering, North Carolina Agricultural and Technical State University, Greensboro, NC 27411 and Materials Science Department, North Carolina State University, Raleigh, NC 27695-7916.
J. Kmetko
Affiliation:
Department of Physics and Astronomy, Northwestern University, IL 60208-3112 Presently at: NSF Center for Advanced Materials and Smart Structures, Department of Electrical Engineering, North Carolina Agricultural and Technical State University, Greensboro, NC 27411 and Materials Science Department, North Carolina State University, Raleigh, NC 27695-7916.
C. B. Lee
Affiliation:
Department of Electrical Engineering, North Carolina Agricultural and Technical State University, Greensboro, NC 27411 Presently at: NSF Center for Advanced Materials and Smart Structures, Department of Electrical Engineering, North Carolina Agricultural and Technical State University, Greensboro, NC 27411 and Materials Science Department, North Carolina State University, Raleigh, NC 27695-7916.
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Abstract

A combination of two nondestructive techniques, Grazing Incidence X-ray Reflectivity and High Resolution X-ray Diffraction, is used to study (at around 10Å resolution) the composition profile across a 500Å thick film of BaTiO3 grown epitaxially on (100) MgO by MOCVD. Results from both studies indicate diffusion of Mg to about 250Å into the film at film-substrate interface, consistent with the diffuse ferroelectric phase transition observed in this film. The lattice parameter a shows a progressive decrease as we move into the film from the interface, and an anomalously low value in the Mg-free portion of the film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 591 , 1999 , 37
Copyright
Copyright © Materials Research Society 2000

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