The microstructures in Schottky barrier samples of Al and Cr single layer metal contacts and Al-Cr bimetal contacts on p-type Si have been investigated using analytical transmission electron microscope (TEM). Al-Cr bimetal contacts were made using a layered structure with one thin layer and a thick layer on the top. The analytical TEM was used to determine the precise thickness and grain size of the coated materials as well as chemical compositions and morphologies. The present study proposes that the microstructures of the Schottky contact interfaces are important for the Schottky barrier heights of Al, Cr, and Al-Cr contacts.
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