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Interferometer Type Pressure Microsensor

Published online by Cambridge University Press:  01 February 2011

A. Heredia-J ,
Alonso Ramirez-Pichon ,
J. Sánchez Mondragón ,
A. Andrade Lucio ,
M. Basurto Pensado ,
R. J. Romero  and
A. Torres-J
A. Heredia-J
Affiliation:
aheredia@susu.inaoep.mx, Universidad Popular Autónoma del Estado de Puebla, Depto. de Física,, Mexico
Alonso Ramirez-Pichon
Affiliation:
ingalonsoft@yahoo.com, UPAEP, Mecatronica, Mexico
J. Sánchez Mondragón
Affiliation:
jsanchez@inaoep.mx, Instituto Nacional de Astrofísica Óptica y Electrónica, Departamento de Óptica, Mexico
A. Andrade Lucio
Affiliation:
UG, Guanajuato, México
M. Basurto Pensado
Affiliation:
mbasurto@uaem.mx, Universidad Autónoma del Estado de Morelos, Av. Universidad # 1001 col. Chamilpa, Cuernavaca, Morelos, México, Mexico, 777 3297084, 7773297984
R. J. Romero
Affiliation:
rosenberg@uaem.mx, Universidad Autónoma del Estado de Morelos, Centro de Investigación en Ingeniería y Ciencias Aplicadas,, Mexico
A. Torres-J
Affiliation:
mtorres@cio.mx, Centro de Investigación en Óptica, Optica, Mexico
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Abstract

In this work, the fabrication of waveguide and nitride silicon membrane is presented. The measurement configuration chosen to detect the variation produced in the light properties is an Interferometer configuration of the Mach Zehnder Type (MZI), because of its high sensitivity. One of its arms is positioned on a floating silicon nitride membrane that becomes deformed under small pressures on the range of MPa. According to the parameters of the membrane and the waveguide we obtain a maximum deformation of 176 nm that produces a change of phase of 180° between the two waves, producing therein a null interferometer output for the maximum pressure.

The analyses of theory suggest that this device will be able to sense a pressure value up to 13.376MPa.

Keywords

amorphouschemical vapor deposition (CVD) (deposition)microelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 888: Symposium V – Materials and Devices for Smart Systems II , 2005 , 0888-V03-18
Copyright
Copyright © Materials Research Society 2006

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References

VI References

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