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Investigation of Cell-Sensor Hybrid Structures by Focused Ion Beam (FIB) Technology

Published online by Cambridge University Press:  26 February 2011

Andreas Heilmann ,
Frank Altmann ,
Andreas Cismak ,
Werner Baumann  and
Mirko Lehmann
Andreas Heilmann
Affiliation:
hei@iwmh.fhg.de, Fraunhofer Institute for Mechanics of Materials IWM, Biological Materials, Interfaces, Heidealle 19, Halle, 06120, Germany, 49 345 55 89 180, 49 345 55 89 101
Frank Altmann
Affiliation:
fa@iwmh.fhg.de, Fraunhofer Institute for Mechanics of Materials, Halle (Saale), 06120, Germany
Andreas Cismak
Affiliation:
cis@iwmh.fhg.de, Fraunhofer Institute for Mechanics of Materials, Halle (Saale), 06120, Germany
Werner Baumann
Affiliation:
werner.baumann@uni-rostock.de, University of Rostock, Biophysics Department, Rostock, 18057, Germany
Mirko Lehmann
Affiliation:
Mirko.Lehmann@Micronas.com, Micronas GmbH, Freiburg, 79108, Germany
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Abstract

For the investigation of the adhesion of mammalian cells on a semiconductor biosensor structure, nerve cells on silicon neurochips were prepared for scanning electron microscopy investigations (SEM) and cross-sectional preparation by focused ion beam technology (FIB). The cross-sectional pattern demonstrates the focal adhesion points of the nerve cells on the chip. Finally, SEM micrographs were taken parallel to the FIB ablation to investigate the cross section of the cells slice by slice in order to demonstrate the spatial distribution of focal contact positions for a possible three-dimensional reconstruction of the cell-silicon interface.

Keywords

ion-beam processingmorphologyscanning electron microscopy (SEM)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 983: Symposium LL – Focused Ion Beams for Analysis and Processing , 2006 , 0983-LL03-03
Copyright
Copyright © Materials Research Society 2007

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