Skip to main content

Low Energy Electron Microscopy for Semiconductor Applications

  • Marian Mankos (a1), Vassil Spasov (a2), Liqun Han (a3), Shinichi Kojima (a4), Ximan Jiang (a5), Salam Harb (a6), Luca Grella (a7) and Cory Czarnik (a8)...

A novel low energy electron microscope (LEEM) aimed at improving the throughput and extending the applications for semiconductor devices has been developed. A dual beam approach, where two beams with different landing energies illuminate the field of view, is used to mitigate the charging effects when the LEEM is used to image semiconductor substrates with insulating or composite (insulator, semiconductor, metal) surfaces. We have experimentally demonstrated this phenomenon by imaging a variety of semiconductor device wafers without deleterious charging effects. Results from several important semiconductor device layers will be illustrated in detail.

Hide All
1.Telieps, W. and Bauer, E., Ultramicroscopy, 17, p. 57 (1985).
2.Tromp, R.M. and Reuter, M.C., Ultramicroscopy, 50, p. 171 (1993).
3.Jansen, G.H., J. Appl. Phys. 84, p. 4549 (1998).
4.Mkrtchyan, M.M., Liddle, J.A., Berger, S.D. and Harriott, L.R., J. Appl. Phys. 78, p. 6888 (1995).
5.Mankos, M. and Adler, D., Ultramicroscopy, 93, p. 347 (2002).
6.Kolarik, V., Veneklasen, L.H. and Mankos, M., Optik, 87, p. 1 (1991).
7.Degenhardt, R., Ph.D.Dissertation, Technische Hochschule Darmstadt (1992).
8.Veneklasen, L.H. and Adler, D.L.; U.S. Patent # 6,586,733, July 1, 2003.
9.Adler, D.L. and Marcus, M.; U.S. Patent # 6,979,819, December 27, 2005.
10.Mankos, M., Adler, D., Veneklasen, L. and Munro, E., Surface Science, 601, p. 4733 (2007).
11.Mankos, M. and Munro, E., U.S. Patent # 7,217,924, May 15, 2007.
12.Step and Flash® imprint lithography (S-FIL®), Molecular Imprints, Inc.
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed