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Low Si-OH ORMOCER®s for Dielectrical and Optical Interconnection Technology

Published online by Cambridge University Press:  01 February 2011

Ralf Buestrich ,
Frank Kahlenberg ,
Michael Popall ,
Adelheid Martin  and
Oliver Rösch
Ralf Buestrich
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-97082 Würzburg, Germany
Frank Kahlenberg
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-97082 Würzburg, Germany
Michael Popall*
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-97082 Würzburg, Germany
Adelheid Martin
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-97082 Würzburg, Germany
Oliver Rösch
Affiliation:
Robert Bosch GmbH, D-70049 Stuttgart, Germany
*
# Author to whom correspondence should be addressed
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Abstract

ORMOCER®*s (inorganic-organic hybrid polymers) with low Si-OH content were synthesized by a new sol-gel route. Optimization of the sol-gel process parameters (catalyst, temperature etc.) was performed in order to achieve reproducible low cost materials which are photo-patternable even in higher layer thicknesses up to 150 μm within one step without cracking or delamination. The materials combine low losses in the NIR region (0.2 dB/cm at 1310 nm and 0.5 dB/cm at 1550 nm without fluorination!) with low dielectric constants (3.3 at 10 kHz).

Beside the dielectric and optical properties the materials have a variety of additional advantages for interconnection technology: good wetting and adhesion on various substrates (e.g. glass, silicon and several polymers), low processing temperatures (postbake below 160 °C), high thermal stability (up to 270 °C) and a tunable refractive index.

Details of chemical synthesis and characterization as well as photo-lithographic processing of ORMOCER® materials are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 628: Symposium CC – Hybrid Organic/Inorganic Materials , 2000 , CC9.8
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

[1] Popall, M., Dabek, A., Robertsson, M. E., Gustafsson, G., Hagel, O.-J., Olsowski, B., Buestrich, R., Cergel, L., Lebby, M., Kiely, P., Joly, J., Lambert, D., Schaub, M. and Reichl, H., Proc. 48th Electronic Components and Technology Conference, Seattle, WA, 1018–1025 (1998).Google Scholar
[2] Rösch, O. S., Bernhard, W., Müller-Fiedler, R., Buestrich, R., Roscher, C., Popall, M., Dannberg, P., Pompe, G., and Neyer, A., Proc. Polymer Optical Fibres and Applications Conference (POF), Berlin, 332–338 (1998).Google Scholar
[3] Rösch, O. S., Bernhard, W., Müller-Fiedler, R., Dannberg, P., Bräuer, A., Buestrich, R. and Popall, M., Proc. 44th SPIE-meeting, 3799, 214–224 (1999).Google Scholar
[4] Seddon, A. B., Critical Rew. Conf. Sol-Gel and Polymer Photonic Devices Proc. CR68, San Diego, 143–171, (1997).Google Scholar
[5] Del Monte, F., Cheben, P., Grover, C. P. and McKenzie, J. D., J. Sol-Gel Sci. Technol., 73–85 (1999).Google Scholar
[6] a) Buestrich, R., Kahlenberg, F., Popall, M., Dannberg, P., Müller-Fiedler, R., Rösch, O. S., Proc. EUROMAT '99 13 (1999). b) J. Sol-Gel Sci. Technol., (2000) (to be published).Google Scholar
[7] Wipfelder, E. and Höhn, K., Angew. Makromol. Chem., 218, 111–126 (1994).Google Scholar
[8] Brunet, F., J. Non-Cryst. Solids, 231, 58–77 (1998).Google Scholar
[9] Hoebbel, D., Reinert, T. and Schmidt, H., J. Sol-Gel Sci. Technol., 7, 217–224 (1996).Google Scholar