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Low temperature growth and laser-induced phase transformation of perovskite oxide films for uncooled IR detector applications

  • Wendy Sarney (a1), John W Little (a2), Frank E Livingston (a3), Krisztian Niesz (a4), Melanie W Cole (a5) and Daniel E Morse (a6)...

Abstract

Pyroelectric infrared (IR) detectors based on perovskite oxides are of interest in part because of their lack of need for cooling, which makes them relatively more affordable and operationally simpler than cooled photon detector systems. We are investigating two methods for low-cost growth of perovskite oxide thin films, namely, a bio-inspired, low-temperature synthesis method and a modified industry-standard metalorganic solution deposition (MOSD) method. Subsequent to film synthesis, we utilize direct-write laser phase conversion and micro-electro-mechanical systems (MEMS) fabrication for development of an uncooled IR focal plane array (FPA). Film growth, crystallization and MEMS processes are compatible with monolithic integration of the detector pixels directly onto Si readout integrated circuits (ROICs).

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1 Radebaugh, R., J. Phys. Condens. Matter. 21, 164219 (2009).
2 Morse, D.E., Trends Biotechnol. 17, 230 (1999).
3 Brutchey, R. and Morse, D.E., Angew. Chem. Int. Ed. 45, 6564 (2006).
4 Niesz, K. and Morse, D.E., submitted (2009).
5 Cole, M.W., Joshi, P.C., Hubbard, C.W. and Ngo, E., Integrated Ferroelectrics 83, 99 (2006).
6 Livingston, F.E. and Helvajian, H., Special Issue Mater. Res. Bull. 32, 40 (2007).
7 Livingston, F.E., Sarney, W.L., Niesz, K., Ould-Ely, T., Tao, A.R., and Morse, D.E., Proc. SPIE 7321, 732101 (2009).

Keywords

Low temperature growth and laser-induced phase transformation of perovskite oxide films for uncooled IR detector applications

  • Wendy Sarney (a1), John W Little (a2), Frank E Livingston (a3), Krisztian Niesz (a4), Melanie W Cole (a5) and Daniel E Morse (a6)...

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