Skip to main content
×
×
Home

Manipulation of Nucleation During Si Molecular Beam Epitaxy

  • Mats I. Larsson (a1), Wei-Xin Ni (a1) and Göran V. Hansson (a1)
Abstract

In this study we report on manipulation of nucleation by means of periodic modulation of the growth rate, R, during molecular beam epitaxial growth of Si on Si(l11). We have found that the bilayer (BL)-by-BL growth can be improved by applying the R-modulation synchronized with the nucleation and that the phase of reflection high-energy electron diffraction (RHEED) intensity oscillations can be shifted independently of the bilayer (BL) deposition. A beating phenomenon of the RHEED oscillations was observed, which can be attributed to the superimposed effects of the R-modulation and the regular BL-by-BL growth. We have used the phenomenological correspondence between the surface step density and the RHEED oscillations as a basis to discuss the growth. By employing a kinetic solid-on-solid Monte Carlo model without vacancies and overhangs all significant experimental features could be simulated.

Copyright
References
Hide All
[1] Markov, V. A., Pchelyakov, O. P., Sokolov, L. V., Stenin, S. I. and Stoyanov, S., Surf. Sci. 250, 229 (1991).
[2] Larsson, M. I., Björklund, L.-E. and Hansson, G. V., in: Silicon-Molecular Beam Epitaxy, Eds. Bean, J. C., Iyer, S. S. and Wang, K. L., Vol. 220 (Mater. Res. Soc, Pittsburgh, 1991) p. 49.
[3] Larsson, M. I. and Hansson, G. V., Jpn. J. Appl. Phys. 33, 2282 (1994).
[4] Larsson, M. I., Ni, W.-X., and Hansson, G. V., Phys. Rev. B 50, 5335 (1994).
[5] Ni, W.-X., Henry, A., Larsson, M. I., Joelsson, K., and Hansson, G. V., Appl. Phys. Lett. 65, 1772 (1994).
[6] Maksym, P. A., Semicond. Sci. Technol. 3, 594 (1988).
[7] Yokotsuka, T., Wilby, M. R., Vvedensky, D. D., Kawamura, T., Fukutani, K. and Ino, S., Appl. Phys. Lett. 62, 1673 (1993).
[8] Clarke, S. and Vvedensky, D. D., Phys. Rev. Lett. 58, 2235 (1987).
[9] Sudijono, J., Johnson, M. D., Snyder, C. W., Elowitz, M. B. and Orr, B. G., Phys. Rev. Lett. 69, 2811 (1992).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 3 *
Loading metrics...

Abstract views

Total abstract views: 57 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 14th August 2018. This data will be updated every 24 hours.