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Mapping the ε” of Conducting Solid Films in Situ

  • M. J. Werner (a1) and R. J. King (a1)
Abstract

Two nondestructive microwave methods for sensing and mapping the local loss factor ε” of conducting solid films are described. Example results of both methods are compared to the low frequency sheet resistance as measured by two- and four-point probe methods. Specimens ranged from 26 to 10,000 ohms per square. Depending on the test frequency, spatial resolution of about 1 cm is achievable, as demonstrated by maps of ε”.

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1. King, Ray J., U.S. Patent No. 5 334 941 (2 August 1994).
2. King, R.J. and Yen, Y.H., IEEE Trans. on Microwave Theory and Techniques MTT–29 (11), 12251231,(November 1981 ).
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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