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Material-Process Interactions in the Annealing of Gallium Arsenide
Published online by Cambridge University Press: 15 February 2011
Abstract
This review article provides an overview of the current understanding of the physical mechanisms involved in the annealing of ion implanted GaAs by thermal techniques and by CW and pulsed laser and electron beams. The successfulness of these techniques is evaluated in terms of the electrical and optical properties of the annealed layers. Promising areas of investigation for the improvement of the electrical properties of n-type layers produced by pulsed annealing are identified.
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- Research Article
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- Copyright © Materials Research Society 1982
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