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Mechanisms of cross-talk in large area a-Si:H continuous image sensors

  • M. Mulato, J. P. Lu (a1), S. E. Ready (a1), K. Van Schuylenbergh (a1), J. Ho (a1), R. Lau (a1), J. B. Boyce (a1) and R. A. Street (a1)...

We report studies of the image-blur effects caused by lateral cross-talk between neighboring pixels of large-area amorphous silicon (a-Si:H) image sensors. The lateral conduction is attributed to three effects: conduction along the interface between the a-Si:H film and the underlying passivation; field-dependent electron injection at the edge of the sensor; and a field enhancement of the interface conduction due to the bias applied to the address lines. We show that the cross-talk can be controlled by choice of the operating conditions and optimization of the materials.

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[1] Mulato M., Lemmi F., Lau R., Lu J. P., Ho J., Ready S. E., Rahn J. T., and Street R. A., The Physics of Medical Imaging, Proc. SPIE, Vol. 3977, 26 (2000).
[2] Street R.A., “Large Area Image Sensor Arrays”, in Technology and Applications of Amorphous Silicon, Editor Street R.A., Springer Series in Materials Science 37, Springer-Verlag, Berlin, 2000, chapter 4, p.147.
[3] Rahn J.T., Lemmi F., Mei P., Lu J.P., Boyce J.B., Street R.A., Apte R.B., Ready S.E., Schuylenbergh K.F. Van, Nylen P., Ho J., Fulks R.T., Lau R., and Weisfield R., Mat. Res. Soc. Symp. Proc. Vol. 557, 809 (1999).
[4] Lemmi F., Rahn J.T., and Street R.A., Proc. 18th International Conference on Amorphous and Microcrystalline Semiconductors, Snowbird, UT, Aug.1999. J. of Non-Cryst. Solids 266–269, 1203 (2000).
[5] Mulato M., Lu J.P. and Street R., J. of Appl. Physics 89, 638 (2001).
[6] Mulato M., Lemmi F., Ready S. E., Lu J. P., Street R. A., Ho J., Lau R. and Boyce J. B., Mater. Res. Soc. Symp. Proc. (in press).
[7] Rahn J T., Lemmi F., Weisfield R.L., Lujan R., Mei P., Lu J.P., Ho J., Ready S.E., Apte R.B., Nylen P., Boyce J., and Street R.A., The Physics of Medical Imaging, Proc. SPIE 3659, 510 (1999).
[8] Weisfield R. L., Hartney M., Schneider R., Aflatooni K., and Lujan R., The Physics of Medical Imaging, Proc. SPIE 3659, 307 (1999).
[9] Mulato M. et al. , J. of Appl. Physics (in press).
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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