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Microdiffraction Studies of Oxygen in Silicon - A New SiO2 Phase?

Published online by Cambridge University Press:  28 February 2011

J. C. H. Spence ,
N. Long ,
W. Bergholz ,
Y. Kim  and
M. O'Keeffe
J. C. H. Spence
Affiliation:
Department of Physics, Arizona State University, Tempe, Arizona 85287 USA
N. Long
Affiliation:
CSSS, Arizona State University, Tempe, Arizona 85287 USA
W. Bergholz
Affiliation:
Siemens Research, Otto Hahn Ring 6, 8000 Munchen 83, F.R.G.
Y. Kim
Affiliation:
Department of Physics, Arizona State University, Tempe, Arizona 85287 USA
M. O'Keeffe
Affiliation:
Department of Chemistry, Arizona State University, Tempe, AZ 85287 USA
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Abstract

Evidence for a new microcrystalline precipitate in CZ Si annealed for 256 hrs at 635°C is presented by electron microdiffraction. This may be a precursor phase for the formation of amorphous platelets [9]. Multiple scattering microdiffraction calculations which distinguish the symmetries of two models for the thermal donor are also given.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 59: Symposium K – Oxygen, Carbon, Hydrogen and Nitrogen in Crystalline Silicon , 1985 , 237
Copyright
Copyright © Materials Research Society 1986

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References

REFERENCES

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