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Micro-Raman Evaluation of Polycrystalline Silicon MEMS Devices

Published online by Cambridge University Press:  01 February 2011

Justin R. Serrano ,
Leslie M. Phinney  and
Sean P. Kearney
Justin R. Serrano
Affiliation:
serranoabq@gmail.com, Sandia National Laboratories, Thermal-Fluids-Aero Experimental Sciences Department, P.O. Box 5800, MS 1310, Albuquerque, NM, 87185-1310, United States, (505) 844-0188, (505) 845-8620
Leslie M. Phinney
Affiliation:
lmphinn@sandia.gov, Sandia National Laboratories, Engineering Sciences Center, United States
Sean P. Kearney
Affiliation:
spkearn@sandia.gov, Sandia National Laboratories, Engineering Sciences Center, United States
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Abstract

Micro-Raman spectroscopy is a valuable tool for thermometry of operational polysilicon MEMS devices. By using the temperature-calibrated response of the optical phonon peak of the polysilicon Raman signature and the micron-scale spatial resolution achieved with a 488 nm Ar+ laser Raman probe, we have obtained spatially resolved steady-state thermal profiles of Joule-heated thermal flexure actuators. The measured thermal profiles are further compared to one-dimensional numerical models of the thermal response of the electrically heated devices.

Keywords

Raman spectroscopymicroelectro-mechanical (MEMS)polycrystal

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 890: Symposium Y – Surface Engineering for Manufacturing Applications , 2005 , 0890-Y08-37
Copyright
Copyright © Materials Research Society 2006

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