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Microstructure and Nanomechanical Properties of Amorphous Carbon Thin Films Prepared by Pulsed Laser Deposition in Various Atmospheres

Published online by Cambridge University Press:  10 February 2011

Q. Wei ,
S. Yamolenko ,
J. Sankar ,
A.K. Sharma ,
Y. Yamagata  and
J. Narayan
Q. Wei
Affiliation:
NSF Center for Advanced Materials and Smart Structures, Dept of Mechanical Engineering, McNair Hall, North Carolina A&T State University, Greensboro, NC 27411, quiming@ncat.edu
S. Yamolenko
Affiliation:
NSF Center for Advanced Materials and Smart Structures, Dept of Mechanical Engineering, McNair Hall, North Carolina A&T State University, Greensboro, NC 27411, quiming@ncat.edu
J. Sankar
Affiliation:
NSF Center for Advanced Materials and Smart Structures, Dept of Mechanical Engineering, McNair Hall, North Carolina A&T State University, Greensboro, NC 27411, quiming@ncat.edu
A.K. Sharma
Affiliation:
Dept of Materials Science and Engineering, Burlington Labs, P. O. Box 7916, North Carolina State University, Raleigh, NC 27695-7916
Y. Yamagata
Affiliation:
Dept of Materials Science and Engineering, Burlington Labs, P. O. Box 7916, North Carolina State University, Raleigh, NC 27695-7916
J. Narayan
Affiliation:
Dept of Materials Science and Engineering, Burlington Labs, P. O. Box 7916, North Carolina State University, Raleigh, NC 27695-7916
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Abstract

We have investigated the effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous diamondlike carbon (DLC) thin films prepared by pulsed laser deposition. The amorphous carbon films were deposited in various atmospheres such as nitrogen and argon at different pressures. We used Raman spectroscopy and optical microscopy to study the bonding characteristics and microstructures of the DLC films. Nanoindentation measurements were carried out on various samples prepared under different conditions to study the effect of chamber pressure and atmosphere on the elastic modulus and nano-hardness of the films. It was found that reduced vacuum leads to softer amorphous carbon films. Amorphous carbon films prepared in higher pressures exhibit increased density of particulates, and significantly rough surface. The results were understood in terms of thermalization of the laser plasma due to increased possibility of collision.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 616: Symposium I – New Methods, Mechanisms & Models of Vapor Deposition , 2000 , 217
Copyright
Copyright © Materials Research Society 2000

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