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Microstructure of and Crystal Defects in Nanocrystalline Tin Dioxide Thin Films

Published online by Cambridge University Press:  10 February 2011

X. Pan  and
J.G. Zheng
X. Pan
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI, 48109, panx@umich.edu
J.G. Zheng
Affiliation:
H.H. Wills Physics Laboratory, University of Bristol, Tyndall Avenue, Bristol, BS8 1TL, UK
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Abstract

Nanocrystalline SnO2 thin films, prepared by electron beam evaporation from high purity SnO2 and post deposition annealing in air at 700°C with different times, were investigated using HRTEM. The films are composed of nanocrystalline SnO2 crystallites and pores. Many of the crystallites consist of crystal defects, such as crystallographic shearing planes (CSPs), dislocations and twin boundaries (TBs). Atomistic structures of these defects were investigated. These defects interact with each other, resulting in different configurations of crystallites. The local composition at CSP and TB steps at dislocation cores varies with the type of dislocations and CSPs and is different from the stoichiometric composition of SnO2. Thus, the electronic structure at these defects is different from that of the perfect SnO2.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 472: Symposium I – Polycrystalline Thin Films - Structure, Texture, Properties..III , 1997 , 87
Copyright
Copyright © Materials Research Society 1997

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