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Microstructure of Sputter Deposited TiO2/SiO2 Multilayer Optical Coatings

Published online by Cambridge University Press:  21 March 2011

E. Sutter ,
P. Sutter  and
J.J. Moore
E. Sutter
Affiliation:
Department of Physics, Colorado School of Mines, Golden, CO 80401, USA
P. Sutter
Affiliation:
Department of Physics, Colorado School of Mines, Golden, CO 80401, USA
J.J. Moore
Affiliation:
Department of Metallurgical and Materials Engineering, Colorado School of Mines, Golden, CO 80401, USA
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Abstract

The microstructure of TiO2/SiO2 multilayer optical filters has been investigated in detail by cross-sectional transmission electron microscopy and related to their optical properties and stability. The amorphous TiO2 layers in the as-deposited multilayers are found to consist of nanocolumns and intercolumnar regions with non-stoichiometric or lower density material. In humid ambients this microstructure absorbs moisture which causes a shift in the absorption edge of the filters. Upon annealing the TiO2layers are found to recrystallize into the low-temperature anatase modification which leads to significantly improved stability of the optical properties of the filters.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 654: Symposia AA – Structure-Property Relationships of Oxide Surfaces & Interfaces , 2000 , AA3.38.1
Copyright
Copyright © Materials Research Society 2001

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