Hostname: page-component-8448b6f56d-c4f8m Total loading time: 0 Render date: 2024-04-17T15:21:47.811Z Has data issue: false hasContentIssue false

Microwave Plasma Assisted CVD of Diamond on Titanium and Ti-6Al-4V

Published online by Cambridge University Press:  10 February 2011

D. A. Tucker
Affiliation:
Lambda Technologies, Inc., 8600 Jersey Ct., Suite C, Raleigh, NC 27613
M. T. McClure
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Campus Box 7919, Raleigh, NC 27695-7919
Z. Fathi
Affiliation:
Lambda Technologies, Inc., 8600 Jersey Ct., Suite C, Raleigh, NC 27613
Z. Sitar
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Campus Box 7919, Raleigh, NC 27695-7919
B. Walden
Affiliation:
Department of Physics, Trinity College, 300 Summit St., Hartford, CT 06106
W. H. Sutton
Affiliation:
United Technologies Research Center, 411 Silver Lane-MS-24, East Hartford, CT 06108
W. A. Lewis
Affiliation:
Lambda Technologies, Inc., 8600 Jersey Ct., Suite C, Raleigh, NC 27613
J. B. Wei
Affiliation:
Lambda Technologies, Inc., 8600 Jersey Ct., Suite C, Raleigh, NC 27613
Get access

Abstract

The ultimate goal of this research was to demonstrate a Microwave Plasma assisted Chemical Vapor Deposition (MPCVD) process to coat a Ti-6A1-4V bearing shaft. Preliminary experiments were performed in an ASTeX™ system on flat chemically pure titanium and Ti-6AI-4V coupons. Diamond deposition was also attempted on a Ti-6AI-4V wedge sample which contained a curved surface that simulated the bearing. Although uniform diamond deposition was attained on the flat samples, very poor uniformity was observed on the curved sample. This lack of uniformity was attributed to the difficulty in controlling the plasma-to-substrate distance in a single mode, single frequency reactor and it was believed that by varying the frequency and using a multimode cavity one could solve this problem. Thus, depositions on a titanium rod were performed in a variable frequency MPCVD reactor. It was determined visually that the variable frequency operation provided uniform plasma distribution along the length and circumference of the rod and resulted in a fairly uniform coating. However, scanning electron microscopy revealed that the morphology of the particles was poor and micro-Raman spectroscopy showed weak, broad peaks that were attributable to amorphous carbon. It is believed that by fine-tuning parameters, a uniform diamond film of good quality can be achieved along the entire rod.

Type
Research Article
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Stoner, B.R., Ma, G.-H.M., Wolter, S.D., and Glass, J.T., Phys. Rev. B 45, 11067 (1992).Google Scholar
2. Ager, J.W. III and Drory, M.D., Phys. Rev. B 48, 2601 (1993)Google Scholar
3. Rudder, R.A., Hendry, R.C., Hudson, G.C., Markunas, R.J., Johnson, A.C., Thigpen, L.T., Garard, R.S., and Everleigh, C.A. in Microwaves: Theory and Application in Materials Processing II, edited by Clark, D.E., Tinga, W.R., and Laia, J.R. Jr. (American Ceramic Society Proc. 36, Cincinnati, OH, 1993) p. 377.Google Scholar
4. Johnson, A.C., Rudder, R.A., Lewis, W.A., and Hendry, R.C. in Microwave Processing of Materials IV, edited by Iskander, M.F., Lauf, R.J., and Sutton, W.H. (Mater. Res. Soc. Proc. 347, San Francisco, CA, 1994) p. 617.Google Scholar
5. Knight, D.S. and White, W.B., J. Mater. Res. 4, 385 (1989).Google Scholar
6. Zhu, W., Badzian, A.R., and Messier, R. in SPIE Diamond Optics III (SPIE Proc. 1325, 1990) p. 187.Google Scholar