Skip to main content

Mist Deposition Technique as a Green Chemical Route for Synthesizing Oxide and Organic Thin Films

  • Shizuo Fujita (a1), Kentaro Kaneko (a2), Yutaka Fukui (a3), Hiroyuki Nishinaka (a4), Takumi Ikenoue (a5) and Taichi Nomura (a6)...

Ultrasonic spray-assisted mist deposition techniques have been developed as a cost-effective and environmental friendly deposition method for oxide and organic thin films. The chemical vapor deposition (CVD) of a variety of oxide thin films having unique functions, such as Cr2O3, Cu2O, Fe3O4, and Al2O3 thin films, has been demonstrated as well as high-quality ZnO and Ga2O3 films ever reported. In addition to the films deposition by the CVD process, the deposition of organic material thin films from the source solution has also been achieved; as examples we have shown the patterned deposition of water-soluble fluorescent polymers with a metal mask. This may substitute the spin-coating technique and contribute to increase the source consumption efficiency in the thin film deposition. We appeal that the mist deposition is a unique and promising technique as a green chemical route for film deposition.

Hide All
1Lang R. J. J. Acoust. Soc. Am. 34, 6 (1962).
2Rayleigh J. W. S. The Theory of Sound, 2, 344 (1945).
3Nishinaka H. and Fujita S. J. Cryst. Growth 310, 5007 (2008).
4Nishinaka H. Kawaharamura T. and Fujita S. J. Korean Phys. Soc. 53, 3025 (2008).
5Nishinaka H. Kawaharamura T. and Fujita S. Jpn. J. Appl. Phys. 46, 6811 (2007).
6Shinohara D. and Fujita S. Jpn. J. Appl. Phys. 47, 7311 (2008).
7Kaneko K. Nomura T. Kakeya I. and Fujita S. Appl. Phys. Express 2, 075501 (2009).
8Tsukazaki A. Ohtomo A. Onuma T. Ohtani M. Makino T. Sumiya M. Ohtani K. Chichibu S. F. Fuke S. Segawa Y. Ohno H. Koinuma H. and Kawasaki M. Nature Mater. 4, 42 (2005).
9Ryu Y. R. Lubguban J. A. Lee T. S. White H. W. Jeong T.S. Youn C. J. and Kim B. J. Appl. Phys. Lett. 90, 131115 (2007).
10Iwata K. Sakemi T. Yamada A. Fons P. Awai K. Yamamoto T. Matsubara M. Tampo H. and Niki S. Thin Solid Films 445, 274 (2003).
11Nomura K. Ohta H. Takagi A. Kamiya T. Hirano M. and Hosono H. Nature 432, 488 (2004).
12Kawaharamura T. Nishinaka H. Kamada Y. Masuda Y. Lu J.-G., and Fujita S. Korean J. Phys. Soc. 53, 2976 (2008).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *



Full text views

Total number of HTML views: 0
Total number of PDF views: 3 *
Loading metrics...

Abstract views

Total abstract views: 91 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 18th January 2018. This data will be updated every 24 hours.