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MOCVD Behaviors of Two-Sized InGaAs Ordered Nano-Bar Arrays Grown Selectively on a GaAs Substrate

  • Benzhong Wang (a1) and Soo-Jin Chua (a2)

Nanosphere lithography was used to form a nano-scaled SiO2 template on a GaAs substrate. Especially, a simple method for fabricating nanopatterns with multi feature sizes within one step has been invented. These nanopatterns, as a template, can be used to grow selectively ordered nanostructures arrays such as quantum dots, quantum bars with different feature sizes in one step. Two sized In0.25Ga0.75As nano-bar arrays have been successfully grown on a GaAs substrate by MOCVD.

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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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