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Morphology and microstructure of core-shell GaAs/GaxAl1-xAs nanowires investigated by He-ion microscopy and X-ray reciprocal space mapping

Published online by Cambridge University Press:  28 July 2014

Marilena Re
Affiliation:
ENEA, Technical Unit for Materials Technologies – Brindisi Research Center, Strada Statale 7 “Appia” km.706, Brindisi, 72100, Italy.
Francesca Di Benedetto
Affiliation:
ENEA, Technical Unit for Materials Technologies – Brindisi Research Center, Strada Statale 7 “Appia” km.706, Brindisi, 72100, Italy.
Emanuela Pesce
Affiliation:
ENEA, Technical Unit for Materials Technologies – Brindisi Research Center, Strada Statale 7 “Appia” km.706, Brindisi, 72100, Italy.
Ilio Miccoli
Affiliation:
Department of Engineering for Innovation, University of Salento, via per Arnesano, Lecce, 73100, Italy.
Paola Prete
Affiliation:
Institute for Microelectronics and Microsystems (IMM), National Research Council (CNR), via per Arnesano, Lecce, 73100, Italy.
Nicola Lovergine
Affiliation:
Department of Engineering for Innovation, University of Salento, via per Arnesano, Lecce, 73100, Italy.
Leander Tapfer
Affiliation:
ENEA, Technical Unit for Materials Technologies – Brindisi Research Center, Strada Statale 7 “Appia” km.706, Brindisi, 72100, Italy.
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Abstract

In this work we present new results on the morphological and microstructural properties of GaAs-AlxGa1-xAs (x≈0.24) core-shell nanowires (NWs) epitaxially grown on (111)B-GaAs substrates by Au-catalyst assisted metalorganic vapor phase epitaxy (MOVPE). Optimized growth conditions allowed us to fabricate highly-dense arrays of vertically-aligned (i.e., along the <111> crystallographic orientation) NWs. The NW arrays were investigated by Helium Ion microscopy (HeIM) and X-ray double- and triple-axis measurements and reciprocal space mapping (RSM). We demonstrate that these techniques can be employed in order to correlate some intrinsically local morphological information with statistically relevant (i.e. averaged over millions-to-billions of NWs) data on the NW structural properties.

Type
Articles
Copyright
Copyright © Materials Research Society 2014 

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References

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