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MULTILAYER X-RAY REFLECTORS: EFFECTS OF LAYER IMPERFECTIONS

Published online by Cambridge University Press:  28 February 2011

J. Wood ,
N. Grupido ,
K. Hart ,
S. Flessa ,
A. Kadin ,
J. Keem  and
D. Ferris
J. Wood
Affiliation:
Ovonic Synthetic Materials Co., A Div. of Energy Conversion Devices, Inc. 1788 Northwood Dr., Troy, Michigan 48084
N. Grupido
Affiliation:
Ovonic Synthetic Materials Co., A Div. of Energy Conversion Devices, Inc. 1788 Northwood Dr., Troy, Michigan 48084
K. Hart
Affiliation:
Ovonic Synthetic Materials Co., A Div. of Energy Conversion Devices, Inc. 1788 Northwood Dr., Troy, Michigan 48084
S. Flessa
Affiliation:
Ovonic Synthetic Materials Co., A Div. of Energy Conversion Devices, Inc. 1788 Northwood Dr., Troy, Michigan 48084
A. Kadin
Affiliation:
Ovonic Synthetic Materials Co., A Div. of Energy Conversion Devices, Inc. 1788 Northwood Dr., Troy, Michigan 48084
J. Keem
Affiliation:
Ovonic Synthetic Materials Co., A Div. of Energy Conversion Devices, Inc. 1788 Northwood Dr., Troy, Michigan 48084
D. Ferris
Affiliation:
Ovonic Synthetic Materials Co., A Div. of Energy Conversion Devices, Inc. 1788 Northwood Dr., Troy, Michigan 48084
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Abstract

Periodic multilayer structures, consisting of largely amorphous alternating layers of heavy and light elements, have been fabricated by sputtering techniques. Investigations have been carried out into the effects of various types of layer imperfections on the x-ray optical properties of these multilayers. These have included extensive numerical modeling of real multilayers (using a computational scheme based on the complete dynamical theory) with simulations of diffused interfaces and deviations from constant d-spacing. Results are presented for examples of W–C and Hf–Si multilayers, with comparison of measurements at Cu–K to the theoretical model.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 56: Symposium H – Layered Structures and Epitaxy , 1985 , 435
Copyright
Copyright © Materials Research Society 1986

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