Skip to main content

Nanocrystalline Microstructures by Thin-Film Synthesis Methods

  • M. Libera (a1) and D. A. Smith (a1)

Nanostructured materials are being extensively studied because their ∼1–100nm grain size can dramatically affect properties. Most nanocrystalline synthesis methods produce particulate or flake. The process of consolidation also allows coarsening, contamination, and the introduction of porosity. The effect of nanocrystallinity on mechanical properties must be deconvoluted from these extrinsic artifacts. Most synthesis routes also produce small quantities of material. Reproducibly making enough specimens to explore more than a few properties is thus difficult. This paper describes thin-film processes to produce nanostructured materials. Thin-film deposition can easily produce many specimens, free from extrinsic artifacts, with identical composition and processing history. Many methods are now well established to study a variety of thin-film mechanical properties. We show examples of nanostructured films generated by controlling deposition and/or post-deposition processing.

Hide All
1. Birringer, R., Gleiter, H., Klein, H., and Marquardt, P., Phys. Lett. 102A, (1984) 365.
2. Frost, H.J. and Ashby, M.F., Deformation-Mechanism Maps, Pergamon Press, Oxford (1982).
3. Siegel, R., Ann. Rev. Mater. Sci. 21, (1991) 559.
4. Koch, C.C., Nanostructured Materials 2, (1993) 109129.
5. McCandlish, L. and Kear, B., Mat. Sci. & Tech. 6, 953 (1990).
6. Thin Films - Stresses and Mechanical Properties IV, ed. Townsend, P. et al., Mat. Res. Soc. Symp. Proc. V308 (1993) and prior MRS Symposia on this subject.
7. Movchan, B. and Demchishin, A., Phys. Met. Metallogr. 28, 83 (1969)
8. Grovenor, C.R.M., Hentzell, H.T.G., and Smith, D.A., Acta Metall. 32, 773 (1984).
9. Thornton, J.A., Ann. Rev. Mater. Sci. 2, 239 (1977).
10. Hentzell, H.T.G., Grovenor, C.R.M., and Smith, D.A., J. Vac. Sci. Tech. A2, 218 (1984).
11. Smith, D.A., Tu, K., and Weiss, B., Ultramicro. 23, 405 (1987).
12. Smith, D.A. et al. , Mat. Res. Soc. Symp. Proc. 321, 271 (1994)
13. Libera, M. et al, Mat. Res. Soc. Symp. Proc. 280, 715 (1993).
14. Liu, X., Wang, J., Ding, B., Scr. Met. Mater. 28, 59 (1993).
15. Luck, R., Lu, K., Frantz, W., Scr. Met. Mater. 28, 1071 (1993)
16. Allen, C.W. and Smith, D.A., Mat. Res. Soc. Symp. Proc. 201, 405 (1991)
17. Im, J. and Atwater, H., Appl. Phys. Lett. 57, 1766 (1990).
18. Libera, M., Chen, M., and Rubin, K., Mater, J.. Res. 7, 26662676 (1991)
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 1 *
Loading metrics...

Abstract views

Total abstract views: 47 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 22nd July 2018. This data will be updated every 24 hours.