In this work, an Atomic Force Microscope in the so-called Piezoresponse mode and Kelvin mode is used to image the grains, ferroelectric domains and surface potential in lithium niobate thin films. A RF magnetron sputter system was used to deposit LiNbO3 thin films on (100)-oriented Si substrates with SiO2 layer. The surface of the sample shows small grains which diameter ranges from 70 nm to 150 nm and roughness is less than 13 nm. Using the electric field from a biased conducting AFM tip, we show that possible to form and subsequently to visualize ferroelectric state. Also, we report surface charge retention on ferroelectric thin films by Kelvin probe microscope in comparison with the piezoresponse signal.
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