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A New Assembling Method for Nano-sized Particles Using an Electrified Pattern Drawn by a Focused Ion Beam

Published online by Cambridge University Press:  17 March 2011

Hiroshi Fudouzi ,
Mikihiko Kobayashi  and
Norio Shinya
Hiroshi Fudouzi
Affiliation:
5th Research Group, National Research Institute for Metals 1-2-1, Sengen, Tsukuba, Ibaraki 305-0047, Japan
Mikihiko Kobayashi
Affiliation:
5th Research Group, National Research Institute for Metals 1-2-1, Sengen, Tsukuba, Ibaraki 305-0047, Japan
Norio Shinya
Affiliation:
5th Research Group, National Research Institute for Metals 1-2-1, Sengen, Tsukuba, Ibaraki 305-0047, Japan
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Abstract

This paper describes a new technique to fabricate two-dimensional microstructures assembled with nano-sized particles. The nano-sized particles attract a lot of attention because of their unique properties compared to bulk materials. Micro- and nano- structures assembled with nano-sized particles have potential applications in electronic, optical and biochemical fields. The Self-Assembled Monolayer (SAM) film patterning is one of the methods to assemble the nano-sized particles. We have proposed a new method to assemble nano-sized particles on a substrate using an electric field generated by an electrified pattern. In this study, following our methods titanium oxide (TiO2, diam.=21nm) particles were patterned on an n-type (100) silicon substrate having an oxidized layer. The particle deposition on the substrates was carried out using a colloidal suspension process and an aerosol process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 636: Symposium D – Nonlithographic and Lithographic Methods of Nanofabrication-From Ultralarge Scale , 2000 , D9.8.1
Copyright
Copyright © Materials Research Society 2001

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