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Nitridation of Non-Isothermal Silicon Compacts

Published online by Cambridge University Press:  25 February 2011

Jeffrey J. Thomas ,
Renee R. Jesse ,
D. Lynn Johnson  and
Hamlin M. Jennings
Jeffrey J. Thomas
Affiliation:
Depts. of Materials Science and Engineering and Civil Engineering Northwestern University, Evanston, IL 60208
Renee R. Jesse
Affiliation:
Depts. of Materials Science and Engineering and Civil Engineering Northwestern University, Evanston, IL 60208
D. Lynn Johnson
Affiliation:
Depts. of Materials Science and Engineering and Civil Engineering Northwestern University, Evanston, IL 60208
Hamlin M. Jennings
Affiliation:
Depts. of Materials Science and Engineering and Civil Engineering Northwestern University, Evanston, IL 60208
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Abstract

The use of microwave heating for the processing of reaction-bonded silicon nitride offers at least two advantages over conventional heating methods. First, the reaction can be made to proceed preferentially in the interior of the reacting compact by maximizing the temperature gradient resulting from microwave heating. This helps maintain the flow of nitrogen into the compact during the later stages of the reaction, when the overall porosity is reduced. Second, the reaction rate can be controlled by changing the power, which gives better control over the processing than can be obtained using conventional heating.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 269: Symposium L – Microwave Processing of Materials III , 1992 , 277
Copyright
Copyright © Materials Research Society 1992

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References

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