Skip to main content
×
Home
    • Aa
    • Aa

A Novel Integrated MEMS Process Using Fluorocarbon Films Deposited With a Deep Reactive Ion Etching (DRIE) Tool

  • A. A. Ayón (a1), D.-Z Chen (a1), R. Khanna (a1), R. Braff (a1), H. H. Sawin (a1) and M. A. Schmidt (a1)...
Abstract
Abstract

Fluorocarbon films are useful as antistiction films for suspended structure and also for electrical isolation purposes. Furthermore, due to their low dielectric constant and ease of deposition they are useful for VLSI manufacturing applications. Thus, in the interest of building a complete database for these plasma generated fluorocarbon films, we report a designed experiment with a 4-variable matrix to fully characterize deposited films using C4F8 as the feed gas in a high density inductively coupled plasma tool. We also demonstrate the in-situ microfabrication of electrostatic actuators that exhibit the corresponding passivation film for electrical isolation. The utilization of these films as a masking material for MEMS applications and in triple nested mask arrangements is also demonstrated.

Copyright
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

1 P. F. Man , B. P. Gogoi and C. H. Mastrangelo , J-MEMS, 6, 25 (1997).

5 A. Ayón , C. C. Lin , R. Braff , R. Bayt , H. H. Sawin and M. Schmidt , Journal of the Electrochemical Society, 146, 339 (1999).

6 T. E. Karis , G. W. Tyndall , D. Fenzel-Alexander and M. S. Crowder , J. Vac. Sci. Technol., 15, 2382 (1997).

9 N. Amyot , J. E. Klemberg-Sapieha , M. R. Wertheimer , Y. Segui and M. Moisan , IEEE Transactions on Electrical Insulation, 27, 1101 (1992).

10 C. R. Savage and R. B. Timmons , Chem. Mater., 3, 575 (1991).

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 3 *
Loading metrics...

Abstract views

Total abstract views: 49 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 21st August 2017. This data will be updated every 24 hours.