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Numerical Simulation of Laser Induced Substrate Heating for Direct Write of Mesoscopic Integrated Conformal Electronics (MICE)

Published online by Cambridge University Press:  10 February 2011

S. Lowry ,
J. C. Sheu ,
Robert Stewart  and
Robert Parkhill
S. Lowry
Affiliation:
CFD Research Corporation, 215 Wynn Drive, Huntsville, AL 35805, USA, sal@cfdrc.com
J. C. Sheu
Affiliation:
CFD Research Corporation, 215 Wynn Drive, Huntsville, AL 35805, USA, jcs@cfdrc.com
Robert Stewart
Affiliation:
CMS Technetronics Inc., Stillwater, Oklahoma., 5202-2 North Richman Hill Road
Robert Parkhill
Affiliation:
CMS Technetronics Inc., Stillwater, Oklahoma., 5202-2 North Richman Hill Road
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Abstract

A numerical tool is developed to simulate the optical and thermal interactions of selected lasers with precursors and substrates in support of the emerging technology for the direct write of Mesoscopic Integrated Conformal Electronics (MICE). The code couples the Discrete Ordinate Method (DOM) radiation model with the multi-physics computation fluid dynamics code CFD-ACE to predict the conductive and radiative heat transport in the process

This paper provides a brief overview of the numerical model. Selected simulations are presented including comparison with empirical data. The capabilities, limitations, and potential applications of the model with respect to MICE are discussed. Future model enhancements are proposed

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 624: Symposium V – Materials Development for Direct Write Technologies , 2000 , 243
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

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