Hostname: page-component-848d4c4894-x5gtn Total loading time: 0 Render date: 2024-05-13T04:10:51.641Z Has data issue: false hasContentIssue false

Offset Printing of Liquid Microstructures for High Resolution Lithography

Published online by Cambridge University Press:  10 February 2011

Scott M. Miller
Affiliation:
Interfacial Science Laboratory, Dept. of Chemical Engineering, Princeton University
Anton A. Darhuber
Affiliation:
Interfacial Science Laboratory, Dept. of Chemical Engineering, Princeton University
Sandra M. Troian
Affiliation:
Interfacial Science Laboratory, Dept. of Chemical Engineering, Princeton University
Sigurd Wagner
Affiliation:
Dept. of Electrical Engineering, Princeton University, Princeton, N.J. 08544
Get access

Abstract

We have investigated the direct printing of polymer solutions from a chemically patterned stamp onto a hydrophilic target substrate as a new high-throughput alternative to optical lithography. The patterns on the stamp, which are typically in the micron size range, define regions of alternating wettability. They are produced by patterning a hydrophobic self-assembled monolayer previously deposited onto a hydrophilic surface, typically a glass slide or silicon wafer with a natural oxide coating. Polar liquids or aqueous polymeric solutions are then deposited only onto the hydrophilic surface patterns by dip-coating the stamp in a liquid reservoir. The deposited film thickness depends critically on the speed of withdrawal and the feature size and shape. For vertically oriented hydrophilic stripes dipped in a reservoir containing a polar liquid, we have developed a theoretical model whose prediction for the maximum deposited film thickness agrees exceptionally well with experimental measurements. After deposition, the wetted stamp is pressed against a target substrate by means of a motion controlled press. In this way we have so far printed 5µm wide polyethylene oxide lines onto a silicon wafer.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Moaz, R. and Sagiv, J., J. Coll. Interface Sci. 100, 465 (1984).Google Scholar
2 Kumar, A., Biebuyck, H.A., and Whitesides, G.M., Langmuir. 10, 1498 (1994).Google Scholar
3 Dulcey, C.S., Georger, J.H. Jr., Krauthamer, V., Stenger, D.A., Fare, T.L., and Calvert, J.M., Science. 252, 551 (1991).Google Scholar
4 Darhuber, A.A., Troian, S.M., Miller, S.M., and Wagner, S., J. Appl. Phys. 87, 7768 (2000).Google Scholar
5 Landau, L., and Levich, B., Acta Physicochimica U.R.S.S. 17. 42 (1942).Google Scholar
6 Darhuber, A.A., Troian, S.M., Davis, J.M., Miller, S.M., and Wagner, S., J. Appl. Phys. submitted.Google Scholar
7 Qin, D. and Xia, Y., and Whitesides, G.M., Adv. Mater. 8. 917 (1996).Google Scholar
8 Fields, R.J., and Ashby, M.F., Phil. Mag. 33, 33 (1976).Google Scholar
9 Bailey, F.E. Jr., and Koleske, J.V., ed. Poly(ethylene oxide), (Academic Press, New York, 1976), p. 132.Google Scholar
10 Glass, J.E., and Prud'homme, R.K., in Liquid Film Coating, edited by Kistler, S.F., and Schweizer, P.M. (Chapman Hall, London, 1997), pp. 137182.Google Scholar