Hostname: page-component-8448b6f56d-gtxcr Total loading time: 0 Render date: 2024-04-24T18:24:29.548Z Has data issue: false hasContentIssue false
  • English
  • Français

Optimization of the Geometry of the MEMS Electrothermal Actuator to Maximize In-Plane Tip Deflection

Published online by Cambridge University Press:  01 February 2011

Edward S. Kolesar ,
Thiri Htun ,
Brandon Least ,
Jeffrey Tippey  and
John Michalik
Edward S. Kolesar
Affiliation:
e.kolesar@tcu.edu, Texas Christian University, Department of Engineering, TCU Mail Stop 298640, Tucker Technology Center, 2840 Bowie Street West, Fort Worth, TX, 76129, United States, 817-257-6226, 817-257-7704
Thiri Htun
Affiliation:
t.htun@tcu.edu, Texas Christian University, Department of Engineering, TCU Mail Stop 298640, Tucker Technology Center, 2840 Bowie Street West, Fort Worth, TX, 76129, United States
Brandon Least
Affiliation:
b.least@tcu.edu, Texas Christian University, Department of Engineering, TCU Mail Stop 298640, Tucker Technology Center, 2840 Bowie Street West, Fort Worth, TX, 76129, United States
Jeffrey Tippey
Affiliation:
t.tippey@tcu.edu, Texas Christian University, Department of Engineering, TCU Mail Stop 298640, Tucker Technology Center, 2840 Bowie Street West, Fort Worth, TX, 76129, United States
John Michalik
Affiliation:
j.michalik@tcu.edu, Texas Christian University, Department of Engineering, TCU Mail Stop 298640, Tucker Technology Center, 2840 Bowie Street West, Fort Worth, TX, 76129, United States
Get access

Abstract

Several microactuator technologies have been investigated for positioning individual elements in large-scale microelectromechanical systems (MEMS). Electrostatic, magnetostatic, piezoelectric and thermal expansion represent the most common modes of microactuator operation. This investigation optimized the geometry of the asymmetrical electrothermal actuator to maximize its in-plane deflection characteristics. The MEMS polysilicon surface micromachined electrothermal actuator uses resistive (Joule) heating to generate differential thermal expansion and movement. In this investigation, a 3-D model of the electrothermal actuator was designed, and its geometry was optimized using the finite-element analysis (FEA) capabilities of the ANSYS computer program. The electrothermal actuator's geometry was systematically varied to establish optimum values of several critical geometrical ratios that maximize tip deflection. The value of the ratio of the length of the flexure component relative to the length of the hot arm was discovered to be the most sensitive geometrical parameter ratio that maximizes tip deflection.

Keywords

microelectro-mechanical (MEMS)thin filmmicroelectronics
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD03-12
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Guckel, H. et al. , “Thermo-magnetic metal flexure actuators,” Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (1992) p. 73.Google Scholar
2 Huang, Q. and Lee, N., J. Micromech. Microeng., 9, 64 (1999).Google Scholar
3 Hickey, R., Kujath, M., and Hubbard, T., J. Vac. Sci. Technol. A, 20, 971 (2002).Google Scholar
4 Mankame, N.D and Ananthasuresh, G.K, J. Micromech Microeng., 11, 452 (2001).Google Scholar
5 Pan, C.S and Hsu, W., J. Micromech. Microeng., 7, 7 (1997).Google Scholar
6 Lee, C.C and W, W. Hsu, Microsystem Technologies, 9, 331 (2003).Google Scholar
7 Chen, R.S, Kung, C., and Lee, G.B, J. Micromech Microeng., 12, 291 (2002).Google Scholar
8 Kolesar, E.S, Ko, S.Y, Howard, J.T, Allen, P.B, Wilken, J.M, Boydston, N.C, Ruff, M.D, and Wilks, R.J, Thin Solid Films, 377, 719 (2000).Google Scholar
9 Kolesar, E.S et al. , Thin Solid Films, 420, 530 (2002).Google Scholar
10 Tucker, J.C, Guide For Designing Micro-electromechanical Systems in MUMPS, http://www.ece.ncsu.edu/erl/tutorials/mumps/Google Scholar