Skip to main content
×
×
Home

Optimizing Fabrication of Buried Oxide Channel Field Effect Transistors

  • A.G. Schrott (a1), J.A. Misewich (a1), M. Copel (a1), D.W. Abraham (a1) and D.A. Neumayer (a1)...
Abstract

In this paper we describe improved methods of fabrication for an oxide channel field effect transistor (OxFET) similar in architecture to a conventional FET. We demonstrate that a substrate treatment consisting of a low power oxygen ashing followed by annealing yields a strontium (A-site) terminated surface in single-crystal strontium titanate (STO). This surface termination of the substrate results in pulsed laser deposited cuprate-channel films of improved quality.

Copyright
References
Hide All
1 Schrott, A.G., Misewich, J.A., Scott, B.A., Gupta, A., Newns, D. M., Abraham, D.W. in Multicomponent Oxide Films for Electronics, edited by Hawley, M.E., Blank, D.H., Eom, C.-B., and Streiffer, S.K. (Mat. Res. Soc. Proc. 574, Pittsburgh, PA, 1999) pp. 243248; J.A. Misewich, A.G. Schrott, to be published.
2 Newns, D.M., Misewich, J.A., Tsuei, C.C., Gupta, A., Scott, B.A., and Schrott, A.G., Appl. Phys Lett. 73, p.780 (1998).
3 Tsuchiya, P., Kawasaki, M., Kubota, H., Nishino, J., Sato, H., Akoh, H., Koinuma, H., Appl. Phys. Lett. 71, 1570 (1997).
4 Kawaski, M., Takahashi, K., Maeda, T., Tsuchiya, R., Shinohara, M., 0. Ishiyama, Yonezawa, T., Yoshimoto, M., and Koinuma, H., Science 266, 1540 (1994).
5 Ohnishi, T., Takahashi, K., Nakamura, M., Kawasaki, M., Yoshimoto, M., and Koinuma, H., Appl. Phys. Lett. 74, 2531 (1999).
6 Koster, G., Rijnders, G.J.H.M., Blank, D.H.A., and Rogalla, H., Apl. Phys. Lett. 74, 3729 (1999).
7 Zhou, C., Newns, D.M., Misewich, J.A., and Pattnaik, P.C., Appl. Phys. Lett. 70, p. 598 (1997).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed