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Origin of the Laser-Induced Broad Band Luminescence from a WF6/H2/Ar Gas Mixture

Published online by Cambridge University Press:  25 February 2011

P. Heszler ,
P. Mogyorósi  and
J.O. Carlsson
P. Heszler
Affiliation:
Thin Film and Surface Chemistry Group, Department of Chemistry, Uppsala University, Box 531, S-751 21 Uppsala, Sweden
P. Mogyorósi
Affiliation:
Thin Film and Surface Chemistry Group, Department of Chemistry, Uppsala University, Box 531, S-751 21 Uppsala, Sweden
J.O. Carlsson
Affiliation:
Thin Film and Surface Chemistry Group, Department of Chemistry, Uppsala University, Box 531, S-751 21 Uppsala, Sweden
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Abstract

The origin of the ArF excimer laser induced luminescence from a WF6/H2/Ar gas mixture was investigated. The experiments prove that the emission originates from excited W clusters with a size of about 10-20 nm. The influence of the H2 and Ar concentrations, the laser fluence and the repetition rate on the light intensity was studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 236: Symposium B – Photons and Low Energy Particles in Surface Processing , 1991 , 123
Copyright
Copyright © Materials Research Society 1992

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References

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