Skip to main content
×
Home

PECVD Silicon Carbide as a Thin Film Packaging Material for Microfabricated Neural Electrodes

  • Allison Hess (a1), Rocco Parro (a1), Jiangang Du (a1), Jeremy Dunning (a2), Maximillian Scardelletti (a3) and Christian A. Zorman (a1)...
Abstract
Abstract

This paper reports our effort to develop amorphous silicon carbide (a-SiC) films for use as hermetic thin film coatings for mechanically-flexible neural electrodes. In our work, the a-SiC films were deposited by plasma enhanced chemical vapor deposition (PECVD) using two distinct methods, namely a single precursor approach using trimethylsilane, and a dual precursor approach using methane (CH4) and silane (SiH4). The mechanical properties of films deposited on Si substrates were characterized using the wafer curvature and load-deflection methods. The effectiveness of the films as moisture barriers for polyimide substrates was characterized by measuring the leakage currents of SiC-coated interdigitated electrode structures soaked in PBS. A microfabricated prototype of the flat interface nerve electrode (FINE) based on a flexible polyimide substrate and a PECVD SiC capping layer was fabricated using a monolithic process based on conventional micromachining techniques. To facilitate this approach, a reactive ion etching process was developed that exhibited high etch rates and high selectively to the SiC films.

Copyright
References
Hide All
1.Berthold A., Laugere F., Schellevis H., Boer C.R. de, Laros M., Guijt R.M., Sarro P. M., and Vellekoop M. J., Electrophoresis 23, 3511, (2002).
2.Bagolini A., Pakula L., Scholtes T.L.M., Pham H.T.M., French P.J., and Sarro P.M., J. Micromechanics and Microengineering 12, 385, (2002).
3.Flannery A.F., Mourlas N.J., Storment C.W., Tsai S., Tan S.H., Heck J., Monk D., Kim T., Gogoi B., and Kovacs G.T.A., Sens Actuators A, 70, 48, (1998).
4.Cogan S.F., Edell D.J., Guzelian A. A., Liu Y.P., and Edell R., J. Biomed. Mat. Res. - Part A 67, 856, (2003).
5.Du J., Singh N., Summers J., and Zorman C., Mat. Res. Soc. Symp. Proc., 919, 283, (2006).
6.Summers J., Scardelletti M., Parro R., and Zorman C., Proc. SPIE, 6464, 64640H–1, (2007).
7.Dupont Website: www2.dupont.com
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 2 *
Loading metrics...

Abstract views

Total abstract views: 63 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 22nd November 2017. This data will be updated every 24 hours.