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Periodic Structure Formation During Laser Direct-Writing of Palladium Acetate Films: An Optically Regulated Mechanism

Published online by Cambridge University Press:  26 February 2011

L. Baufay  and
M. E. Gross
L. Baufay
Affiliation:
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, NJ 07974
M. E. Gross
Affiliation:
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, NJ 07974
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Abstract

Laser direct-writing of micron-size metallic features from Pd acetate film precursors is achieved using a scanned cw Ar+ laser. Marked periodic structure is observed in these features under a wide range of exposure conditions. A model based on laser reflectivity and transmittance measurements has been developed to describe the formation of the periodic structure. The model takes into account a complex relationship between optical absorption, laser-induced heating and reaction rate. The decomposition of Pd acetate to metal is endothermic and, therefore, this system differs fundamentally from the “explosive” crystallisation of amorphous semiconductors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 89
Copyright
Copyright © Materials Research Society 1998

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References

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