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Photoacoustic Measurement of a-Si:H/a-SiNx:H Superlattice Films

Published online by Cambridge University Press:  26 February 2011

Feng Xiaomei ,
Liu Hsiangna ,
Wang Zhichao ,
Qiu Shuye  and
He Yuliang
Feng Xiaomei
Affiliation:
Physics Department, Nanjing University, Nanjing, P.R., China
Liu Hsiangna
Affiliation:
Physics Department, Nanjing University, Nanjing, P.R., China
Wang Zhichao
Affiliation:
Physics Department, Nanjing University, Nanjing, P.R., China
Qiu Shuye
Affiliation:
Physics Department, Nanjing University, Nanjing, P.R., China
He Yuliang
Affiliation:
Physics Department, Nanjing University, Nanjing, P.R., China
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Abstract

Photoacoustic (PAS) and optical transmission spectra were measured on a-Si:H/a-SiNx:H superlattices. The absorption coefficient ∝ in the range 102∼104 cm-1 was obtained by converting the PAS signal to ∝. The enhancement of the PAS peak intensity Qs and the increase in the width of the Urbach edge with decreasing a-Si:H layer thickness are explained as results of quantum size effect in the superlattice structure.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 77: Symposium D – Interfaces, Superlattices, and Thin Films , 1986 , 659
Copyright
Copyright © Materials Research Society 1987

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References

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