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Photodetector Arrays in Laser-Recrystallized Silicon Integratedwith an Optical Waveguide

Published online by Cambridge University Press:  25 February 2011

R.W. Wu ,
H.A. Timlin ,
H.E. Jackson  and
J.T. Boyd
R.W. Wu
Affiliation:
Solid State Electronics Laboratory, Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, Ohio 45221-0030
H.A. Timlin
Affiliation:
Solid State Electronics Laboratory, Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, Ohio 45221-0030
H.E. Jackson
Affiliation:
Department of Physics, University of Cincinnati, Cincinnati, Ohio 452210011
J.T. Boyd
Affiliation:
Solid State Electronics Laboratory, Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, Ohio 45221-0030
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Abstract

Integrated detection of light propagating in an optical waveguide by aphotodetector array fabricated directly on the waveguide surface isdemonstrated. Laser recrystallization of LPCVD polysilicon patterned withperiodically-spaced anti-reflection stripes is utilized. Lateral p-i-nphotodiode elements formed by ion implantation are characterized by reverseleakage currents of < 10−11 amp and a typical breakdownvoltage of 50 volts. Optical response is found to be linear over a dynamicrange of greater than 55 dB.

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References

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