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A Physically Based Quantum Correction Model for DG MOSFETs

Published online by Cambridge University Press:  01 February 2011

Markus Karner ,
Martin Wagner ,
Tibor Grasser  and
Hans Kosina
Markus Karner
Affiliation:
karner@iue.tuwien.ac.at, TU - Wien, Institute for Microelectronics, Gusshausstr. 27-29 / E360, Vienna, N/A, N/A, Austria, +43 1 58801 360 16, +43 1 58801 360 99
Martin Wagner
Affiliation:
mwagner@iue.tuwien.ac.at, TU - Wien, Institute for Microelectronics, Gußhausstraße 27-29 / E360, Wien, N/A, N/A, Austria
Tibor Grasser
Affiliation:
grasser@iue.tuwien.ac.at, TU - Wien, Institute for Microelectronics, Gußhausstraße 27-29 / E360, Wien, N/A, N/A, Austria
Hans Kosina
Affiliation:
kosina@iue.tuwien.ac.at, TU - Wien, Institute for Microelectronics, Gußhausstraße 27-29 / E360, Wien, N/A, N/A, Austria
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Abstract

In this work we present a physically based quantum correction model for highly scaled double gate (DG) CMOS devices. In contrast to previous work, our quantum correction model is based on the bound states that form in the Si film. The Eigenenergies and expansion coefficients of the wave functions are tabulated for arbitrary parabolic approximations of the potential in the structure. This enables a highly efficient use for TCAD applications.

Keywords

simulationmicroelectronicsnanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 913: Symposium D – Transistor Scaling – Methods, Materials and Modeling , 2006 , 0913-D05-04
Copyright
Copyright © Materials Research Society 2006

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