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Piezo-resistive Pressure Sensor Array with Photo-thermally Reduced Graphene Oxide

Published online by Cambridge University Press:  11 September 2015

Rouzbeh Kazemzadeh  and
Woo Soo Kim
Rouzbeh Kazemzadeh
Affiliation:
School of Mechatronic Systems Engineering, Simon Fraser University, Surrey, B.C. Canada V3T 0A3
Woo Soo Kim*
Affiliation:
School of Mechatronic Systems Engineering, Simon Fraser University, Surrey, B.C. Canada V3T 0A3
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Abstract

We report a highly sensitive pressure sensor fabricated by photo-thermally reduced Graphene oxide (GO) with silver nano wires (AgNWs). Pressure sensors are fabricated in form of the inter-digitated capacitors (IDC) composed of two finger electrodes with pattern width of 500 µm. The fabricated IDCs are compared to the previously reported MEMS-based pressure sensors' sensitivity. The fabricated sensor is easily attachable on any surface for monitoring applied forces or pressure and maintains excellent electrical conductivity under high mechanical stress and thus holds promise for durable bio-medical sensors.

Keywords

sensorlaserablation

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References

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