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Planar integrated plasmonic mid-IR spectrometer


A compact spectrometer-on-a-chip featuring a plasmonic molecular interaction region has been conceived, designed, modeled, and partially fabricated. The silicon-on-insulator (SOI) system is the chosen platform for the integration. The low loss of both silicon and SiO2 between 3 and 4 μm wavelengths enables silicon waveguides on SiO2 as the basis for molecular sensors at these wavelengths. Important characteristic molecular vibrations occur in this range, namely the bond stretching modes C-H (Alkynes), O-H (monomeric alcohols, phenols) and N-H (Amines), as well as CO double bonds, NH2, and CN. The device consists of a broad-band infrared LED, photonic waveguides, photon-to-plasmon transformers, a molecular interaction region, dispersive structures, and detectors. Photonic waveguide modes are adiabatically converted into SPPs on a neighboring metal surface by a tapered waveguide. The plasmonic interaction region enhances optical intensity, which allows a reduction of the overall device size without a reduction of the interaction length, in comparison to ordinary optical methods. After the SPPs propagate through the interaction region, they are converted back into photonic waveguide modes by a second taper. The dispersing region consists of a series of micro-ring resonators with photodetectors coupled to each resonator. Design parameters were optimized via electro-dynamic simulations. Fabrication was performed using a combination of photo- and electron-beam-lithography together with standard silicon processing techniques.

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N-N Feng and L. Dal Negro Plasmon mode transformation in modulated-index metal-dielectric slot waveguides”, Optics Letters, 32, 3086 (2007).

G. Z. Mashanovich , M. M. Milosevic , M. Nedeljkovic , N. Owens , B. Xiong , E. J. Teo , and Y. Hu , “Low loss silicon waveguides for the mid-infrared”, Optics Express 19, 7112 (2011).

A. Spott , Y. Liu , T. Baehr-Jones , R. LLic and M. Hochberg Silicon waveguides and ring resonators at 5.5 μm”, Appl. Phys. Lett. 97, 213501 (2010).

A. Yariv Universal relations for coupling of optical power between microresonators and dielectric waveguides”, Electronic Lett. 36, 322 (2000).

Richard Soref , Robert E. Peale , and Walter Buchwald , “Longwave plasmonics on doped silicon and silicides”, Optics Express 16, 6507 (2008).

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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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